image-for-Clean-Gas-Filter-

Clean Gas Filter – SF

Category: .

Product Description

TypeSeries/CADOperating pressureFiltration
Cartridge typediscSFA100/200/300Max.1.0 MPa(Vacuum: 1.3 x 10-6 kPa)0.01 μm(Filtration efficiency

99.99%)

Cartridge typestraightSFB100Max.1.0 MPa(Vacuum: 1.3 x 10-6 kPa)
Features
  • Cartridge type allows element replacement.
Disposable typestraightSFB300Max.15 MPa(Vacuum: 1.3 x 10-6 kPa)0.01 μm(Filtration efficiency

99.99%)

Disposable typemultiple discSFC100Max.1.8 MPa(Vacuum: 1.3 x 10-6 kPa)
Features
  • Compact disposable type for semiconductor industry